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Call for Papers

Abstract Deadline: Aug 15th 2020      Abstract Acceptance Notification: Aug 31st 2020

Manuscript Deadline: October 30th 2020

Email: iwaps_program@ime.ac.cn

Scope of IWAPS Paper

IWAPS is devoted to publishing research on the cutting-edge microelectronic manufacturing technology. The scope of the conference covers studies of advanced semiconductor manufacturing sciences and technologies from early stage theories and experiments to industrial high volume manufacturing applications. The perspective scope includes, but is not limited to the following areas:

i. Optical Lithography

ii. Extreme Ultraviolet (EUV) Lithography

iii. Advanced Patterning Technologies

iv. Metrology, Inspection and Testing

v. Design and Technology Co-optimization and Design for Manufacturability

vi. Materials

vii. Device

viii.    Process

Full length manuscripts of accepted papers will be considered for publication in the Journal of Microelectronic Manufacturing (JoMM). IWAPS will present an annual award to authors of the paper judged to be the Best Paper.

Abstract Instructions

The abstract must clearly describe the nature, scope, content, organization, key points and significance of the proposed paper.

The ABSTRACT must include paper title, key words, author name, affiliation and full contact information (email and address). The Word of Abstract limit is up to 500 words. Introductory paragraph describing the intended content of your conference is a huge plus to your papers. Graphs are highly encouraged in the submitted abstract. (ABSTARCT TEMPLATE)

Abstracts submitted after the published deadline will be considered on a case-by-case basis.

Presentation Instructions

For oral presenters:

Authors of papers selected for oral presentation shall attend IWAPS 2020 and give a 15 minutes technical overview presentation about your paper. Speakers are responsible for providing a PPT in advance to be uploaded for presentation at the conference. The PPT Due is October 30th 2020. Please send PPT to iwaps_program@ime.ac.cn before the due date.

For poster presenters:

Authors of papers selected for poster presentation may set up their posters from 9:00 am on the day of the poster session. Paper numbers will be posted on the poster boards in numerical order, please find your paper number and post your poster in the designated space. Poster supplies (push-pins) will be available.

About Journal of Microelectronic Manufacturing (JoMM, ISSN: 2578-3769)

JoMM is an international peer-reviewed journal founded by the Institute of Microelectronics of Chinese Academy of Sciences (IMECAS). JoMM aims at reporting the progress on the cutting-edge advanced semiconductor manufacturing sciences and technologies from fundamental research to industrial high volume manufacturing applications. JoMM is inviting papers for 2020 issues. JoMM strives for shortened publication cycle, articles are published online as soon as accepted. And the publication charge is FREE for 2020.

JoMM website: jomm.lithotechsolutions.org

Regular registration: RMB 2400 yuan/person;

Students in school : RMB 1200 yuan/person

Early bird price before September 30, 2020: RMB 2000 yuan/person;

Registration fee covers: Admission to all conference sessions, banquet, buffet, and etc.

Please check your email from iwaps@ime.ac.cn for more registration fee details after you finish your registration.

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