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The updated date of IWAPS-2021 is 12-13 December 2021. The conference venue remains unchanged. Registration is closed.

Please pay attention to our website http://www.iwaps.org/ and Wechat official account Litho World. Thank you for your support to IWAPS!


Registration fee

Regular registration: 2400 RMB/person;

Students in school: 1200 RMB/person;

Members of ICIA, COS, CIE: 1800 RMB/person;

Early bird price before September 30, 2021: 2000 RMB/person;

Registration fee covers: Admission to all conference sessions, banquet, buffet, and etc.

For hotel reservation, please contact Ms. Yinlan Zheng, TEL 15392020082


Please check your email from iwaps@ime.ac.cn for more registration fee details after you finish your registration.



Scope of IWAPS Paper

IWAPS is devoted to publishing research on the cutting-edge microelectronic manufacturing technology. The scope of the conference covers studies of advanced semiconductor manufacturing sciences and technologies from early stage theories and experiments to industrial high volume manufacturing applications. The perspective scope includes, but is not limited to the following areas:

i. Optical Lithography

ii. Extreme Ultraviolet (EUV) Lithography

iii. Advanced Patterning Technologies

iv. Metrology, Inspection and Testing

v. Design and Technology Co-optimization and Design for Manufacturability

vi. Materials

vii. Device

viii. Process


Abstract Instructions

The abstract must clearly describe the nature, scope, content, organization, key points and significance of the proposed paper.

The ABSTRACT must include paper title, key words, author name, affiliation and full contact information (email and address). The Word of Abstract limit is up to 500 words. Introductory paragraph describing the intended content of your conference is a huge plus to your papers. Graphs are highly encouraged in the submitted abstract. (ABSTARCT TEMPLATE)

Abstracts submitted after the published deadline will be considered on a case-by-case basis.


Full Text

After the abstract is accepted, the author needs to submit the final paper in accordance with the requirements of the full-text template. The full text of the paper must be limited to 4 pages. Please send your final paper in Word and PDF version to iwaps_program@ime.ac.cn before the deadline.


Papers of this conference will be submitted to IEEE Xplore and EI for examination. Please be sure to submit the full text before the deadline. Otherwise, it will not be submitted for examination. Please refer to the template format. The full text is limited to 4 pages.
If the full text is longer than four pages, we suggest submitting the full text version that meets the requirements of the conference and the long text version at the same time. We will recommend the long text version to the Journal of Microelectronic Manufacturing when the full text version is submitted to IEEE Xplore and EI. We also welcome authors to contribute to JOMM after expanding the theoretical or experimental content of the full text of the conference.

(FULL TEXT TEMPLATE)


Presentation Instructions

For oral presenters:

Authors of papers selected for oral presentation shall attend IWAPS 2021 and give a 15 minutes technical overview presentation about your paper. Speakers are responsible for providing a PPT in advance to be uploaded for presentation at the conference. The PPT Due is October 15th 2021. Please send PPT to iwaps_program@ime.ac.cn before the due date.

For poster presenters:

Authors of papers selected for poster presentation may set up their posters from 9:00 am on the day of the poster session. Paper numbers will be posted on the poster boards in numerical order, please find your paper number and post your poster in the designated space. Poster supplies (push-pins) will be available.

About Journal of Microelectronic Manufacturing (JoMM, ISSN: 2578-3769)

JoMM is an international peer-reviewed journal founded by the Institute of Microelectronics of Chinese Academy of Sciences (IMECAS). JoMM aims at reporting the progress on the cutting-edge advanced semiconductor manufacturing sciences and technologies from fundamental research to industrial high volume manufacturing applications. JoMM is inviting papers for 2021 issues. JoMM strives for shortened publication cycle, articles are published online as soon as accepted. And the publication charge is FREE for 2021.

JoMM website: www.jommpublish.com/



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