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This is Registration button. Please submit your paper to E-mail: jomm_iwaps@ime.ac.cn
 
 

Call for Papers

Abstract Deadline: July 15th 2019      Abstract Acceptance Notification: July 31st 2019

Manuscript Deadline: September 30th 2019

Email: jomm_iwaps@ime.ac.cn

                                                             

Scope of IWAPS Paper

IWAPS is devoted to publishing research on the cutting-edge microelectronic manufacturing technology. The scope of the conference covers studies of advanced semiconductor manufacturing sciences and technologies from early stage theories and experiments to industrial high volume manufacturing applications. The perspective scope includes, but is not limited to the following areas:  

        i.     Optical Lithography

        ii.    Extreme Ultraviolet (EUV) Lithography

        iii.    Advanced Patterning Technologies

        iv.    Metrology, Inspection and Testing

        v.    Design and Technology Co-optimization and Design for Manufacturability

        vi.    Materials

        vii.    Device

        viii.    Process 

Full length manuscripts of accepted papers will be considered for publication in the Journal of Microelectronic Manufacturing (JoMM). IWAPS will present an annual award to authors of the paper judged to be the Best Paper. 

                                                            

Abstract Instructions

The abstract must clearly describe the nature, scope, content, organization, key points and significance of the proposed paper.  

The ABSTRACT must include paper title, key words, author name, affiliation and full contact information (email and address). The Word of Abstract limit is up to 500 words. Introductory paragraph describing the intended content of your conference is a huge plus to your papers. Graphs are highly encouraged in the submitted abstract.  

Abstracts submitted after the published deadline will be considered on a case-by-case basis.  

Presentation Instructions

For oral presenters:

Authors of papers selected for oral presentation shall attend IWAPS 2019 and give a 15 minutes technical overview presentation about your paper. Speakers are responsible for providing a PPT in advance to be uploaded for presentation at the conference. The PPT Due is October 15th 2019. Please send PPT to jomm_iwaps@ime.ac.cn before the due date. 

For poster presenters:

Authors of papers selected for poster presentation may set up their posters from 9:00 am on the day of the poster session. Paper numbers will be posted on the poster boards in numerical order, please find your paper number and post your poster in the designated space. Poster supplies (push-pins) will be available.

About Journal of Microelectronic Manufacturing (JoMM, ISSN: 2578-3769)

JoMM is an international peer-reviewed journal founded by the Institute of Microelectronics of Chinese Academy of Sciences (IMECAS). JoMM aims at reporting the progress on the cutting-edge advanced semiconductor manufacturing sciences and technologies from fundamental research to industrial high volume manufacturing applications. JoMM is inviting papers for 2019 issues. JoMM strives for shortened publication cycle, articles are published online as soon as accepted. And the publication charge is FREE for 2019.

JoMM website: jomm.lithotechsolutions.org

 

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